Studies on RF MEMS shunt switch
نویسندگان
چکیده
Radio Frequency Micro-Electro-Mechanical-Systems (RF MEMS) based switches are expected to play a key role in the field of microwave switching. Traits like low-loss performance; zero-power consumption and very low inter-modulation distortion have made these switches well suitable for high-performance microwave and millimeter-wave circuits. The design of RF MEMS switches, however, require sophisticated modeling techniques because of their complicated 3-D geometries with critical aspect ratios and strong in-homogeneities. In this paper, the effect of various geometric dimensional parameters on the electromagnetic and mechanical behaviour of a shunt capacitive MEMS switch using finite element method based Ansoft High Frequency Structure Simulator (HFSS) software tool has been presented. This exercise will provide a better insight into designing a reliable and high-performance MEMS shunt switch.
منابع مشابه
Design and simulation of a RF MEMS shunt capacitive switch with low actuation voltage, low loss and high isolation
According to contact type, RF MEMS switches are generally classified into two categories: Capacitive switches and Metal-to-Metal ones. The capacitive switches are capable to tolerate a higher frequency range and more power than M-to-M switches. This paper presents a cantilever shunt capacitive RF MEMS switch with characteristics such as low trigger voltage, high capacitive ratio, short switchin...
متن کاملStudy and Analysis of Rf Mems Shunt Switch for Reconfigurable Antenna
RF MEMS switches can be used to achieve reconfigurability of various RF systems and in particularly for miniaturized antenna structures. In case of micro machined antennas, which involve low voltage signals, RF MEMS switches with low actuation voltage are required for achieving reconfigurability. The capacitive shunt switch derives its switching property from the significant difference of its c...
متن کاملطراحی، شبیهسازی و ساخت سوئیچ خازنی RF MEMSبر روی بستر آلومینا
In this paper, design, analysis and fabrication of a low loss capacitive RF MEMS shunt switch, which made on the coplanar waveguide transmission line and alumina substrate in the frequency band of 40-60 GHz, is presented. The CPW is designed to have 50Ω impedance matching on the alumina substrate. Then the desired switch is designed with appropriate dimensions. Afterward the important par...
متن کاملRF MEMS Switches
An overview of the MEMS technology development and applications is given in this paper. A special attention is paid to the RF MEMS switches. Both series and shunt MEMS switches have been considered. It is also presented a technique for modeling and design of inductively-tuned MEMS shunt switch. Some very important issues for the device maturity e.g. reliability and packaging have been addressed.
متن کاملA High Isolation Series-Shunt RF MEMS Switch
This paper presents a wide band compact high isolation microelectromechanical systems (MEMS) switch implemented on a coplanar waveguide (CPW) with three ohmic switch cells, which is based on the series-shunt switch design. The ohmic switch shows a low intrinsic loss of 0.1 dB and an isolation of 24.8 dB at 6 GHz. The measured average pull-in voltage is 28 V and switching time is 47 μs. In order...
متن کامل